管式PECVD設(shè)備

設(shè)備名稱 Equipment Name

管式PECVD設(shè)備  Horizontal PECVD

設(shè)備型號 Equipment Model

PD-520/PD-520L/PD-520MAX

設(shè)備用途 Equipment Application

SiN、SiON等薄膜沉積。
Depositionof SiN, SiON ,etc.

技術(shù)特點  Features

1、可靠電極接觸，有效減少粉塵、降低高頻報警頻次。

Reliable electrode contact, effectively reduce dust as well as the frequency of high frequency alarms.

2、簡單可靠自動上下舟機構(gòu)，提升設(shè)備維護空間與便利。
Simple and reliable automatic boat loading/unloading unit improves themaintenance space and convenience of the equipment.

3、運動部件單面安裝維護，減少設(shè)備背靠背布局占地面積的同時不影響設(shè)備維護難度。
Single-sided installation and maintenance of moving parts,reducing the footprint of the back-to-back equipment without affecting the maintenance of the equipment.

4、高速平穩(wěn)整體模組推舟機構(gòu)。
High-speed and stable integral module boat pushing mechanism.

5、輔助加熱專利技術(shù)。
Auxiliary heating patent technology.

6、快速鍍膜工藝技術(shù)。
Rapid coating technology.

7、自主知識產(chǎn)權(quán)MES軟件、中央計算機集中控制系統(tǒng)。
MES software & CCC system with independent intellectual property rights.

設(shè)備參數(shù)  Parameters