設(shè)備名稱 Equipment name
管式低壓氧化退火設(shè)備 Horizontal Low Pressure Oxidation/Annealing Equipment
設(shè)備型號 Equipment Model
DOA-420/DOA-420L/DOA-420MAX
設(shè)備用途 Equipment Application
低壓氧化、退火。
Low Pressure oxidation, annealing.
技術(shù)特點 Features
1、大產(chǎn)能。
High throughput.
2、配套相關(guān)專利技術(shù),可兼容或升級硼擴(kuò)散工藝。
Patented technology, compatible or upgradeable with boron diffusion process.
3、獨特雙嵌套爐門結(jié)構(gòu)。
Unique double-layer-nested furnace door structure.
4、高速平穩(wěn)整體模組推舟機(jī)構(gòu)。
High-speed and stable integral module boat pushing mechanism.
設(shè)備參數(shù) Parameters