設備名稱 Equipment Name
光注入退火爐 Light Injection Annealing Furnace
設備型號 Equipment Model
SC-LED05L/RA
設備用途 Equipment Application
調節(jié)電池片費米能級變化,控制H總量及價態(tài),提高H鈍化與缺陷修復效率,達到降低P型電池衰減效應,提高N型電池轉換效率的效果。
By adjusting the Fermi energy level of the cell, controlling the total amount and valence state of H,improving the efficiency of H passivation and defect repair, to reduce the LID effect of P-type cells and improve the conversion efficiency of N-type cells.
工藝流程 Process Flow
預熱→光注入→冷卻
Pre-heating →Light Injection →Cooling
技術特點 Features
1、雙軌產線,機架電氣完全獨立,互不干擾。
Dual-track production line, the rack and electrical parts completely independent without interfering operations of each other.
2、大產能:匹配絲印工序產能,CT≤0.80秒,基于硅片尺寸M10(18X±0.5mm*18X±0.5mm)。
High throughput: match with the throughput of screen printing process, CT≤0.80s,based on silicon wafer size M10 (18X±0.5mm*18X±0.5mm).
設備參數 Parameters