Horizontal PECVD

  Features  

· Reliable electrode contact, effectively reduce dust as well as the frequency of high frequency alarms.

· Simple and reliable automatic boat loading/unloading unit improves themaintenance space and convenience of the equipment.

· Single-sided installation and maintenance of moving parts,reducing the footprint of the back-to-back equipment without affecting the maintenance of the equipment.

· High-speed and stable integral module boat pushing mechanism.

· Auxiliary heating patent technology.

· Rapid coating technology.

· MES software & CCC system with independent intellectual property rights.