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Horizontal PECVD (Two-In-One)
Horizontal PECVD (Two-In-One)
Features
· The AIOx & SiN layers can be coated in the same furnace tube which helps in reducing the process steps,improving the yield and lowering the breakage rate effectively.
· Optimal throughout solution: two-in-one configuration.
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Horizontal PECVD (Poly-Si)
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Horizontal PEALD (A&P)
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