Horizontal Low Pressure Boron Diffusion Equipment

  Features   

· Matured BBr3 liquid source & BCL3 gas source control and delivery technology.

· Patented technology.

· Unique double-layer-nested furnace door structure.

· High-speed and stable integral module boat pushing mechanism.

· Intelligent automatic control.

· MES software with independent intellectual property rights.

· Matching S.C smart production management system.