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Inline TCO Coating Equipment (Reactive Plasma Deposition, RPD/PAR),and Magnetron Sputter,PVD
PRODUCTS AND SERVICES > Inline Equipment Series > Inline TCO Coating Equipment (Reactive Plasma Deposition, RPD/PAR),and Magnetron Sputter,PVD
Inline TCO Coating Equipment (Reactive Plasma Deposition, RPD/PAR),and Magnetron Sputter,PVD
Features
· Multiple cathode operation for seed layer and multiple refractive index tandem TCO.
· No bombardment on the substrate while keeping high mobility.
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