Laser Boron Doping Equipment

  Features  

· Throughput＞8000pcs/h (M10 wafers);Cycle time: 0.9s= (laser 1.6s + laser switching time 0.2s)/2, 2pcs/1.8s. 

· The laser, scanning galvanometer,field lens and all optical components are well-known brands in PV industry,with superior stability and reliability.

· High precision camera alignment, with kinematic calibration algorithm with our patented software is used to achieve high-precision alignment.